INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "REFERENCE GRATING FOR SEMICONDUCTOR METROLOGY SYSTEMS AND METHODS"

GENEVA, Feb. 3 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/068790) for "REFERENCE GRATING FOR SEMICONDUCTOR METROLOGY SYSTEMS AND METHODS" on Jul 03, 2024. With publication no. WO/2025/021453, the details related to the patent application was published on Jan 30, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SONDE, Aniruddha Ramakrishna (77 Danbury RoadWilton, Connecticut 06897), AJGAONKAR, Mahesh, Upendra (77 Danbury RoadWilton, Connecticut 06897), SHOME, Krishanu (77 Danbury RoadWilton, Connecticut 06897)

Abstract: A reference gratin...