INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "REAL TIME RECIPE TUNING FOR INSPECTION SYSTEM"

GENEVA, March 24 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/072825) for "REAL TIME RECIPE TUNING FOR INSPECTION SYSTEM" on Aug 13, 2024. With publication no. WO/2025/056262, the details related to the patent application was published on Mar 20, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WANG, Te-Sheng (80 W Tasman Dr.San Jose, California 95134-1720), WU, Fangzhen (80 W Tasman Dr.San Jose, California 95134-1720)

Abstract: The present disclosure provides a method for real time parameter tuning for a wafer inspection system. The metho...