GENEVA, April 28 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/077319) for "REACTION FORCE COMPENSATION, LITHOGRAPHIC APPARATUS AND METHOD" on Sep 27, 2024. With publication no. WO/2025/082727, the details related to the patent application was published on Apr 24, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HANNOT, Stephan, David, Arjan (P.O. Box 3245500 AH Veldhoven), HEMSCHOOTE, Dries, Vaast, Paul (P.O. Box 3245500 AH Veldhoven), CUIJPERS, Martinus, Agnes, Willem (P.O. Box 3245500 AH Veldhoven)
Abstract:
An apparatus comprises a carr...