INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "RADIATION SPECTRUM CONFIGURATION SYSTEM"

GENEVA, April 14 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/074925) for "RADIATION SPECTRUM CONFIGURATION SYSTEM" on Sep 06, 2024. With publication no. WO/2025/073428, the details related to the patent application was published on Apr 10, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BUIJS, Robin, Daniel (PO Box 3245500 AH Veldhoven), ABDOLVAND, Amir (PO Box 3245500 AH Veldhoven), BELLI, Federico (RiccartonEdinburgh Central Scotland EH14 4AS)

Abstract: A radiation source, a metrology tool, a lithographic apparatus and a method of gene...