GENEVA, Dec. 1 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/061221) for "POSITIONING APPARATUS FOR A STAGE APPARATUS" on Apr 24, 2025. With publication no. WO/2025/242388, the details related to the patent application was published on Nov 27, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): VAN DRENT, William, Peter (P.O. Box 3245500 AH Veldhoven)
Abstract: Disclosed is a coarse positioning apparatus for a stage apparatus, the coarse positioning apparatus comprising: at least one gas spring, each said at least one gas spring comprising a pis...