INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "PELLICLE MEMBRANE FOR AN EUV UTILIZATION APPARATUS AND METHOD OF MANUFACTURING THEREOF"

GENEVA, Oct. 4 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/056084) for "PELLICLE MEMBRANE FOR AN EUV UTILIZATION APPARATUS AND METHOD OF MANUFACTURING THEREOF" on Mar 06, 2025. With publication no. WO/2025/201829, the details related to the patent application was published on Oct 02, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): VERMEULEN, Paul, Alexander (P.O. Box 3245500 AH Veldhoven), DE GRAAF, Dennis (P.O. Box 3245500 AH Veldhoven), HOUWELING, Zomer, Silvester (P.O. Box 3245500 AH Veldhoven), KOEVOETS, Adrianus, Hendrik (P.O. Box 3245...