GENEVA, May 27 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/080755) for "PELLICLE MEMBRANE" on Oct 30, 2024. With publication no. WO/2025/103773, the details related to the patent application was published on May 22, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HOUWELING, Zomer, Silvester (P.O. Box 3245500 AH Veldhoven)
Abstract:
A pellicle membrane for an EUV lithographic apparatus, the pellicle membrane comprising a first membrane layer forming a first external surface, a second membrane layer forming a second external surface substa...