INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "OPTICAL MEASUREMENT SYSTEM"

GENEVA, Oct. 4 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/057156) for "OPTICAL MEASUREMENT SYSTEM" on Mar 17, 2025. With publication no. WO/2025/201933, the details related to the patent application was published on Oct 02, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CUNBUL, Ahmet, Burak (P.O. Box 3245500 AH Veldhoven), SMIRNOV, Stanislav (77 Danbury RoadWilton, Connecticut 06897)

Abstract: Disclosed is an optical measurement system for measuring a topology of a surface of a substrate. The optical measurement system includes a light p...