INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "ON THE FLY LOCAL ALIGNMENT"

GENEVA, Oct. 13 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/057116) for "ON THE FLY LOCAL ALIGNMENT" on Mar 14, 2025. With publication no. WO/2025/209815, the details related to the patent application was published on Oct 09, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CHEN, Te-Yu (80 W Tasman DriveSan Jose, California 95134)

Abstract: A charged particle beam inspection method includes acquiring an image of an alignment mark during a constant velocity stage movement and performing alignment corrections prior to imaging a care area asso...