INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "NON-CENTROSYMMETRIC FRINGE-BASED METROLOGY TARGETS AND METHODS"

GENEVA, June 30 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/082387) for "NON-CENTROSYMMETRIC FRINGE-BASED METROLOGY TARGETS AND METHODS" on Nov 14, 2024. With publication no. WO/2025/131461, the details related to the patent application was published on Jun 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): NAGHIBZADEH, Shahrzad (P.O. Box 3245500 AH Veldhoven), ZWIER, Olger, Victor (P.O. Box 3245500 AH Veldhoven)

Abstract: There is provided a method of metrology comprising: obtaining calibration data from at least one first target compr...