INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "MULTI-BEAM CHARGED-PARTICLE APPARATUS FOR UNIFORM PROBE CURRENT"

GENEVA, June 30 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/082897) for "MULTI-BEAM CHARGED-PARTICLE APPARATUS FOR UNIFORM PROBE CURRENT" on Nov 19, 2024. With publication no. WO/2025/131509, the details related to the patent application was published on Jun 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): XI, Qingpo (80 W Tasman DriveSan Jose, California 95134), GONG, Zizhou (80 W Tasman DriveSan Jose, California 95134)

Abstract: A charged-particle beam apparatus comprises a first aperture array including a plurality of elongated ape...