INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "MODULE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS AND METHOD FOR CLAMPING A SENSOR MEMBER"

GENEVA, Oct. 26 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/056524) for "MODULE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS AND METHOD FOR CLAMPING A SENSOR MEMBER" on Mar 11, 2025. With publication no. WO/2025/218972, the details related to the patent application was published on Oct 23, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): VAN DE VEN, Bastiaan, Lambertus, Wilhelmus, Marinus (P.O. Box 3245500 AH Veldhoven), BROKKEN, Dirk (P.O. Box 3245500 AH Veldhoven), RAMOS, Andre, Filipe, Lemos, Antunes, Palma (P.O. Box 3245500 AH Ve...