GENEVA, June 30 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/082324) for "MODULE AND CHARGED PARTICLE-OPTICAL DEVICE" on Nov 14, 2024. With publication no. WO/2025/131453, the details related to the patent application was published on Jun 26, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): PEIJSTER, Jerry, Johannes, Martinus (P.O Box 3245500 AH Veldhoven), KUIPER, Vincent, Sylvester (P.O Box 3245500 AH Veldhoven), MA, Yue (P.O Box 3245500 AH Veldhoven)
Abstract:
The present disclosure relates to a module for a charged particle-optical dev...