INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "MODULAR MOVEABLE LOADING STATION FOR A LITHOGRAPHY APPARATUS"

GENEVA, Feb. 2 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/068409) for "MODULAR MOVEABLE LOADING STATION FOR A LITHOGRAPHY APPARATUS" on Jun 27, 2025. With publication no. WO/2026/021790, the details related to the patent application was published on Jan 29, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WADE, Robert, Jeffrey (77 Danbury RoadWilton, Connecticut 06897), LUTTIKHUIS, Bernardus, Antonius, Johannes (P.O. Box 3245500 AH Veldhoven)

Abstract: A lithography system comprising a lithography apparatus and a modular moveable loading s...