GENEVA, June 16 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/082401) for "METROLOGY TOOL AND METHOD" on Nov 14, 2024. With publication no. WO/2025/119620, the details related to the patent application was published on Jun 12, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): KUZUCU, Oktay, Onur (PO Box 3245500 AH Veldhoven)
Abstract:
A metrology tool for inspection of a structure on an object comprises: projection optics; detection optics; a detector array; and a controller. The projection optics is arranged to project radiation onto the st...