INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METROLOGY SYSTEM WITH OPTICAL ELEMENT(S) HAVING SURFACE STRUCTURES"

GENEVA, Oct. 26 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/057616) for "METROLOGY SYSTEM WITH OPTICAL ELEMENT(S) HAVING SURFACE STRUCTURES" on Mar 20, 2025. With publication no. WO/2025/219001, the details related to the patent application was published on Oct 23, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): REZVANI NARAGHI, Roxana (77 Danbury RoadWilton, Connecticut 06897), JAHANI, Saman (77 Danbury RoadWilton, Connecticut 06897), PAWLOWSKI, Michal, Emanuel (77 Danbury RoadWilton, Connecticut 06897), KELKAR, Parag, Vinayak (77 Danbury ...