INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METROLOGY METHOD FOR DETERMINING ONE OR MORE PARAMETERS OF A PERIODIC TARGET ON AN OBJECT AND ASSOCIATED METROLOGY APPARATUS"

GENEVA, July 29 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/087627) for "METROLOGY METHOD FOR DETERMINING ONE OR MORE PARAMETERS OF A PERIODIC TARGET ON AN OBJECT AND ASSOCIATED METROLOGY APPARATUS" on Dec 19, 2024. With publication no. WO/2025/153300, the details related to the patent application was published on Jul 24, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): NIENHUYS, Han-Kwang (P.O. Box 3245500 AH Veldhoven), VAN DER POST, Sietse, Thijmen (P.O. Box 3245500 AH Veldhoven), EL GAWHARY, Omar (P.O. Box 3245500 AH Veldhoven), TINNEMAN...