GENEVA, Aug. 24 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/050280) for "METROLOGY METHOD AND ASSOCIATED METROLOGY DEVICE" on Jan 08, 2025. With publication no. WO/2025/171949, the details related to the patent application was published on Aug 21, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): VAN PUTTEN, Eibert, Gerjan (P.O. Box 3245500 AH Veldhoven), TINNEMANS, Patricius, Aloysius, Jacobus (P.O. Box 3245500 AH Veldhoven), COENE, Willem, Marie, Julia, Marcel (P.O. Box 3245500 AH Veldhoven)
Abstract:
Disclosed is a metrology method comp...