GENEVA, April 19 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/077087) for "METROLOGY METHOD AND ASSOCIATED METROLOGY DEVICE" on Sep 26, 2024. With publication no. WO/2025/078166, the details related to the patent application was published on Apr 17, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): BUIJNSTERS, Frank, Jaco (PO Box 3245500 AH Veldhoven), SCHOUTROP, Chris, Eric, Maria (PO Box 3245500 AH Veldhoven)
Abstract:
Disclosed is a method of identifying a source of a reconstruction error relating to reconstruction of a plurality of mode...