INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METROLOGY ACCURACY IMPROVEMENT USING REFERENCE GEOMETRIC PARAMETER"

GENEVA, June 30 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/083504) for "METROLOGY ACCURACY IMPROVEMENT USING REFERENCE GEOMETRIC PARAMETER" on Nov 25, 2024. With publication no. WO/2025/131571, the details related to the patent application was published on Jun 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MOS, Everhardus, Cornelis (P.O. Box 3245500 AH Veldhoven), KIERS, Antoine, Gaston, Marie (P.O. Box 3245500 AH Veldhoven), VAN DER SCHAAR, Maurits (P.O. Box 3245500 AH Veldhoven), MEESSEN, Hieronymus, Johannus, Christiaan (P.O. Box 3...