INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHODS AND SYSTEMS FOR RETICLE CONDITIONING AND THERMAL MODELING TO IMPROVE RETICLE HEATING STABILITY"

GENEVA, Sept. 21 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/054370) for "METHODS AND SYSTEMS FOR RETICLE CONDITIONING AND THERMAL MODELING TO IMPROVE RETICLE HEATING STABILITY" on Feb 18, 2025. With publication no. WO/2025/190621, the details related to the patent application was published on Sep 18, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SUBRAMANIAN, Raaja Ganapathy (P.O. Box 3245500 AH Veldhoven), CHEN, Lien-Sheng (P.O. Box 3245500 AH Veldhoven), JOHNSON, Richard, John (77 Danbury RoadWilton, Connecticut 06897)

Abstract: A me...