INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHODS AND SAMPLES TO DETERMINE CHARGED-PARTICLE BEAM SPOT SIZE"

GENEVA, June 23 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/085573) for "METHODS AND SAMPLES TO DETERMINE CHARGED-PARTICLE BEAM SPOT SIZE" on Dec 10, 2024. With publication no. WO/2025/125271, the details related to the patent application was published on Jun 19, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): REN, Weiming (80 W Tasman DriveSan Jose, California 95134), SUN, Yan (80 W Tasman DriveSan Jose, California 95134), FU, Jiyou (80 W Tasman DriveSan Jose, California 95134), JI, Xiaoyu (80 W Tasman DriveSan Jose, California 95134)

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