INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHODS AND APPARATUSES FOR INDEPENDENT RAREFICATION PULSE FOR CO2 LASER DRIVEN EUV SOURCE"

GENEVA, Feb. 4 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/066333) for "METHODS AND APPARATUSES FOR INDEPENDENT RAREFICATION PULSE FOR CO2 LASER DRIVEN EUV SOURCE" on Jun 11, 2025. With publication no. WO/2026/021738, the details related to the patent application was published on Jan 29, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ZHU, Qiushi (17075 Thornmint CourtSan Diego, California 92127), ADAMS, Joshua, Ross (17075 Thornmint CourtSan Diego, California 92127), EVERAGE, George J (17075 Thornmint CourtSan Diego, California 92127), DAS...