INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD TO DETERMINE GHOST REFLECTIONS IN AN INTERFEROMETER SYSTEM, INTERFEROMETER SYSTEM, PROJECTION SYSTEM AND EXPOSURE APPARATUS"

GENEVA, Oct. 18 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/057675) for "METHOD TO DETERMINE GHOST REFLECTIONS IN AN INTERFEROMETER SYSTEM, INTERFEROMETER SYSTEM, PROJECTION SYSTEM AND EXPOSURE APPARATUS" on Mar 20, 2025. With publication no. WO/2025/214738, the details related to the patent application was published on Oct 16, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): JANSEN, Maarten, Jozef (P.O. Box 3245500 AH Veldhoven), KWEE, Patrick (P.O. Box 3245500 AH Veldhoven)

Abstract: A method to determine ghost reflections in an interfero...