GENEVA, June 19 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/081197) for "METHOD OF SUBSTRATE SUPPORT REPAIR" on Nov 05, 2024. With publication no. WO/2025/119563, the details related to the patent application was published on Jun 12, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): BLUMBERG, Christian (P.O. Box 3245500 AH Veldhoven), KIEVEN, David (P.O. Box 3245500 AH Veldhoven)
Abstract:
A method of joining a support member to a substrate support, the method comprising: inserting the support member into a recess in the substrate support ...