INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD OF SETTING UP OF A LITHOGRAPHY APPARATUS"

GENEVA, June 10 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/080937) for "METHOD OF SETTING UP OF A LITHOGRAPHY APPARATUS" on Nov 01, 2024. With publication no. WO/2025/113929, the details related to the patent application was published on Jun 05, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): STAALS, Frank (P.O. Box 3245500 AH Veldhoven)

Abstract: Disclosed is a method of determining compact lens model dependency data. The method comprises obtaining input lens model dependency data describing relationships between aberration data and a ...