INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD OF SCANNING A SAMPLE WITH NON-CIRCULAR BEAM SPOTS"

GENEVA, June 23 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/084581) for "METHOD OF SCANNING A SAMPLE WITH NON-CIRCULAR BEAM SPOTS" on Dec 03, 2024. With publication no. WO/2025/125017, the details related to the patent application was published on Jun 19, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ZHOU, Yongjian (80 W Tasman DriveSan Jose, California 95134), GONG, Zizhou (80 W Tasman DriveSan Jose, California 95134), JI, Xiaoyu (80 W Tasman DriveSan Jose, California 95134), REN, Weiming (80 W Tasman DriveSan Jose, California 95134)

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