INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD OF PREDICTING AN ON PRODUCT EFFECT OF A WAFER LOAD GRID"

GENEVA, Nov. 30 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/061156) for "METHOD OF PREDICTING AN ON PRODUCT EFFECT OF A WAFER LOAD GRID" on Apr 24, 2025. With publication no. WO/2025/242386, the details related to the patent application was published on Nov 27, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): AARDEN, Frans, Bernard (P.O. Box 3245500 AH Veldhoven)

Abstract: Disclosed is a method of predicting an on-product parameter of interest data component attributable to physical interaction between a substrate and a substrate support. T...