INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD OF PREDICTING AN EFFECT OF A MAINTENANCE ACTION IN PRODUCTION OF INTEGRATED CIRCUITS AND ASSOCIATED APPARATUS"

GENEVA, July 29 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/086477) for "METHOD OF PREDICTING AN EFFECT OF A MAINTENANCE ACTION IN PRODUCTION OF INTEGRATED CIRCUITS AND ASSOCIATED APPARATUS" on Dec 16, 2024. With publication no. WO/2025/153272, the details related to the patent application was published on Jul 24, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): AARDEN, Frans, Bernard (P.O. Box 3245500 AH Veldhoven)

Abstract: Disclosed is a method of predicting an effect of a potential substrate table maintenance action relating to a subs...