INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD OF OPTIMIZING A WEIGHTING FOR PARAMETER OF INTEREST DATA AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES"

GENEVA, Feb. 3 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/068081) for "METHOD OF OPTIMIZING A WEIGHTING FOR PARAMETER OF INTEREST DATA AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES" on Jun 27, 2024. With publication no. WO/2025/021420, the details related to the patent application was published on Jan 30, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): THISSEN, Nick, Franciscus, Wilhelmus (P.O. Box 3245500 AH Veldhoven), MEYFROYT, Thomas, Meriam, Marcel (P.O. Box 3245500 AH Veldhoven), LUSITANI, Filippo (P.O. Box 3245500 AH Veldhov...