INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD OF MONITORING PERFORMANCE, METHOD OF MANUFACTURING DEVICES, COMPUTER PROGRAM AND LITHOGRAPHIC APPARATUS"

GENEVA, April 19 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/075447) for "METHOD OF MONITORING PERFORMANCE, METHOD OF MANUFACTURING DEVICES, COMPUTER PROGRAM AND LITHOGRAPHIC APPARATUS" on Sep 12, 2024. With publication no. WO/2025/078098, the details related to the patent application was published on Apr 17, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): GATTOBIGIO, Giovanni, Luca (P.O. Box 3245500 AH Veldhoven), VAN OENE, Maarten, Marinus (P.O. Box 3245500 AH Veldhoven)

Abstract: A method of monitoring the performance of an immersion ...