GENEVA, Sept. 8 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/051694) for "METHOD OF MONITORING AN EXPOSURE PROCESS" on Jan 23, 2025. With publication no. WO/2025/180728, the details related to the patent application was published on Sep 04, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): RAVICHANDRAN, Arvind (P.O. Box 3245500 AH Veldhoven), ISSA, Hamze (P.O. Box 3245500 AH Veldhoven)
Abstract:
Disclosed is a method of monitoring an exposure process, comprising: obtaining a set of first monitoring data relating to a performance of a monito...