GENEVA, May 5 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/077820) for "METHOD OF METROLOGY AND ASSOCIATED APPARATUSES" on Oct 03, 2024. With publication no. WO/2025/087670, the details related to the patent application was published on May 01, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): NIENHUYS, Han-Kwang (PO Box 3245500 AH Veldhoven)
Abstract:
Disclosed is a metrology method for measuring a periodic structure on a substrate comprising: obtaining observation data relating to at least one observed spectrum, each said at least one obs...