GENEVA, June 30 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/082757) for "METHOD OF LITHOGRAPHY AND ASSOCIATED APPARATUS" on Nov 18, 2024. With publication no. WO/2025/131485, the details related to the patent application was published on Jun 26, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): GREIJDANUS, Erik, Martijn (P.O. Box 3245500 AH Veldhoven), HOFMANS, Gerardus, Carolus, Johannus (P.O. Box 3245500 AH Veldhoven), LI, Jianfeng (P.O. Box 3245500 AH Veldhoven)
Abstract:
Disclosed is a method for exposing structures onto a plurality of...