INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD OF FORECASTIG A DRIFT IN A PARAMETER OF INTEREST IN A SEMICONDUCTOR MANAUFACTURING PROCESS"

GENEVA, July 19 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/087002) for "METHOD OF FORECASTIG A DRIFT IN A PARAMETER OF INTEREST IN A SEMICONDUCTOR MANAUFACTURING PROCESS" on Dec 18, 2024. With publication no. WO/2025/149331, the details related to the patent application was published on Jul 17, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): REGASSA, Tariku Tessema (P.O. Box 3245500 AH Veldhoven), CAMPO CAICEDO, Damian Andres (P.O. Box 3245500 AH Veldhoven), DOS SANTOS GUZELLA, Thiago (P.O. Box 324Veldhoven)

Abstract: Described is a met...