INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD OF DETERMINING CONTAMINATION INFORMATION AND AN OBJECT STAGE ADAPTED TO IMPLEMENT THE METHOD"

GENEVA, Dec. 15 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/062191) for "METHOD OF DETERMINING CONTAMINATION INFORMATION AND AN OBJECT STAGE ADAPTED TO IMPLEMENT THE METHOD" on May 05, 2025. With publication no. WO/2025/252366, the details related to the patent application was published on Dec 11, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CARBONE, Ludovico (P.O. Box 3245500 AH Veldhoven), REIJNDERS, Marinus, Petrus (P.O. Box 3245500 AH Veldhoven), DREISSEN, Mante (P.O. Box 3245500 AH Veldhoven)

Abstract: The present disclosure provid...