INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD OF DETERMINING AN EXPOSURE STRATEGY, LITHOGRAPHY METHOD AND APPARATUS AND COMPUTER PROGRAM"

GENEVA, March 9 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/071447) for "METHOD OF DETERMINING AN EXPOSURE STRATEGY, LITHOGRAPHY METHOD AND APPARATUS AND COMPUTER PROGRAM" on Jul 29, 2024. With publication no. WO/2025/045481, the details related to the patent application was published on Mar 06, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): YU, Hyunwoo (P.O. Box 3245500 AH Veldhoven), KHO, Sinatra, Canggih (P.O. Box 3245500 AH Veldhoven), LAMBREGTS, Cornelis, Johannes, Henricus (P.O. Box 3245500 AH Veldhoven), BLOM, Herman, Martin (P.O. B...