INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD FOR USE WITH A SENSOR SYSTEM OF A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS COMPRISING A SENSOR SYSTEM"

GENEVA, Feb. 8 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/068508) for "METHOD FOR USE WITH A SENSOR SYSTEM OF A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS COMPRISING A SENSOR SYSTEM" on Jun 30, 2025. With publication no. WO/2026/027154, the details related to the patent application was published on Feb 05, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): IMPONENTE, Giovanni (P.O. Box 3245500 AH Veldhoven), MORSINK, Bart, Johan (P.O. Box 3245500 AH Veldhoven), BART, Hendricus, Gerardus, Julius (P.O. Box 3245500 AH Veldhoven), WALLER...