INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD FOR REDUCING STOCHASTIC FAILURES VIA SOURCE-MASK OPTIMIZATION"

GENEVA, March 24 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/072956) for "METHOD FOR REDUCING STOCHASTIC FAILURES VIA SOURCE-MASK OPTIMIZATION" on Aug 15, 2024. With publication no. WO/2025/056265, the details related to the patent application was published on Mar 20, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): PENG, Xingyue (80 W Tasman DriveSan Jose, California 95134), YEH, Li-Hao (80 W Tasman DriveSan Jose, California 95134), KAPLAN, Christopher, James (80 W Tasman DriveSan Jose, California 95134), YANG, Ken (P.O. Box 3245500 AH Veld...