GENEVA, March 24 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/072704) for "METHOD FOR DETERMINING ROOT CAUSES OF EVENTS OF A SEMICONDUCTOR MANUFACTURING PROCESS AND FOR MONITORING A SEMICONDUCTOR MANUFACTURING PROCESS" on Aug 12, 2024. With publication no. WO/2025/056258, the details related to the patent application was published on Mar 20, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): LANCIA, Carlo (P.O. Box 3245500 AH Veldhoven), GKOROU, Dimitra (P.O. Box 324Veldhoven), VAN HERTUM, Pieter (P.O. Box 3245500 AH Veldhoven)
Abstract:
Des...