INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD AND SYSTEM FOR EUV ENERGY ADJUSTMENT VIA RAREFACTION PULSE ADJUSTMENT"

GENEVA, Sept. 16 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/055430) for "METHOD AND SYSTEM FOR EUV ENERGY ADJUSTMENT VIA RAREFACTION PULSE ADJUSTMENT" on Feb 27, 2025. With publication no. WO/2025/186108, the details related to the patent application was published on Sep 11, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): PIOVAN, Giulia (17075 Thornmint CourtSan Diego, California 92127), CHANG, Steven (17075 Thornmint CourtSan Diego, California 92127), PURVIS, Michael, Anthony (17075 Thornmint CourtSan Diego, California 92127)

Abstract: ...