INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD AND SYSTEM FOR CLUSTERING PATTERNS FOR OPTICAL PROXIMITY CORRECTION VERIFICATION PROCESS"

GENEVA, May 27 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/079430) for "METHOD AND SYSTEM FOR CLUSTERING PATTERNS FOR OPTICAL PROXIMITY CORRECTION VERIFICATION PROCESS" on Oct 18, 2024. With publication no. WO/2025/103701, the details related to the patent application was published on May 22, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LIU, Ziyang (80 W Tasman DriveSan Jose, California 95134), WU, Jie (80 W Tasman DriveSan Jose, California 95134), PENG, Yi-Hsing (80 W Tasman DriveSan Jose, California 95134)

Abstract: Described herein...