INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD AND SYSTEM FOR ASSESSING MACHINE LEARNING MODEL PREDICTION ACCURACY IN OPTICAL PROXIMITY CORRECTION VERIFICATION PROCESS"

GENEVA, May 17 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/078788) for "METHOD AND SYSTEM FOR ASSESSING MACHINE LEARNING MODEL PREDICTION ACCURACY IN OPTICAL PROXIMITY CORRECTION VERIFICATION PROCESS" on Oct 11, 2024. With publication no. WO/2025/098716, the details related to the patent application was published on May 15, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): PENG, Yi-Hsing (80 W Tasman DriveSan Jose, California 95134), ZHANG, Youping (80 W Tasman DriveSan Jose, California 95134)

Abstract: Described herein is a method and sys...