INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD AND APPARATUS FOR MEASURING A TOPOGRAPHY OF A SURFACE OF AN OBJECT"

GENEVA, May 17 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/077300) for "METHOD AND APPARATUS FOR MEASURING A TOPOGRAPHY OF A SURFACE OF AN OBJECT" on Sep 27, 2024. With publication no. WO/2025/098678, the details related to the patent application was published on May 15, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SAJADI HEZAVEH, Mohsen (P.O. Box 3245500 AH Veldhoven)

Abstract: An apparatus for measuring a topography of a surface of an object comprises: an illumination system; an interference module; and a detection system. The illum...