INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD AND APPARATUS FOR ASSESSING A SAMPLE SURFACE, METHOD OF SCANNING A SAMPLE SURFACE AND CHARGED PARTICLE ASSESSMENT APPARATUS"

GENEVA, June 30 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/082359) for "METHOD AND APPARATUS FOR ASSESSING A SAMPLE SURFACE, METHOD OF SCANNING A SAMPLE SURFACE, AND CHARGED PARTICLE ASSESSMENT APPARATUS" on Nov 14, 2024. With publication no. WO/2025/131457, the details related to the patent application was published on Jun 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MAASSEN, Martinus, Gerardus, Johannes, Maria (P.O. Box 3245500 AH Veldhoven)

Abstract: The present disclosure provides methods and apparatus relating to assessing a...