INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "MEMBRANE MONITORING APPARATUS AND METHOD AND LITHOGRAPHIC APPARATUS"

GENEVA, March 24 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/072835) for "MEMBRANE MONITORING APPARATUS AND METHOD, AND LITHOGRAPHIC APPARATUS" on Aug 13, 2024. With publication no. WO/2025/056263, the details related to the patent application was published on Mar 20, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SCHLIJPER, Michael, Raimond, Lambert (P.O. Box 3245500 AH Veldhoven), SI, Fai Tong (P.O. Box 3245500 AH Veldhoven)

Abstract: A monitoring subsystem for monitoring a membrane in use in a lithographic apparatus, the monitoring s...