GENEVA, April 6 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/072909) for "MASKING MODULE" on Aug 14, 2024. With publication no. WO/2025/067759, the details related to the patent application was published on Apr 03, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): VOS, Hermanus (P.O. Box 3245500 AH Veldhoven), VAN ENGELEN, Adrianus, Josephus, Petrus (P.O. Box 3245500 AH Veldhoven), SWINKELS, Jan, Johannes, Maria (P.O. Box 3245500 AH Veldhoven)
Abstract:
A masking module for use in a lithographic apparatus, comprising a moveable masking blad...