INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "MAGNETIC LEVITATION POSITIONER ASSEMBLY FOR USE IN A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS THEREWITH, METHOD OF OPERATING THE ASSEMBLY AND METHOD OF MANUFACTURING DEVICES COMPRISING THE METHOD OF OPERATING OR USING THE APPARATUS"

GENEVA, April 19 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/075070) for "MAGNETIC LEVITATION POSITIONER ASSEMBLY FOR USE IN A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS THEREWITH, METHOD OF OPERATING THE ASSEMBLY AND METHOD OF MANUFACTURING DEVICES COMPRISING THE METHOD OF OPERATING OR USING THE APPARATUS" on Sep 09, 2024. With publication no. WO/2025/078087, the details related to the patent application was published on Apr 17, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): TUMER, Can (P.O. Box 3245500 AH Veldhoven), DONDERS, Sjoerd,...