INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "LITHOGRAPHIC APPARATUS, CALIBRATION RETICLE, CALIBRATION METHOD AND DEVICE MANUFACTURING METHOD"

GENEVA, Sept. 29 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/053426) for "LITHOGRAPHIC APPARATUS, CALIBRATION RETICLE, CALIBRATION METHOD AND DEVICE MANUFACTURING METHOD" on Feb 10, 2025. With publication no. WO/2025/195676, the details related to the patent application was published on Sep 25, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SCHOLTEN, Bert, Dirk (P.O. Box 3245500 AH Veldhoven), MOHAMMED, Mahir, Asif (P.O. Box 3245500 AH Veldhoven), CHONG, Derick, Yun, Chek (P.O. Box 3245500 AH Veldhoven), GEELEN, Paul, Jean, Maurice (P.O. B...