INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "LASER DIFFRACTION OPTICAL MICROSCOPY FOR ULTRA-THIN PATTERN WAFER"

GENEVA, April 28 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/075988) for "LASER DIFFRACTION OPTICAL MICROSCOPY FOR ULTRA-THIN PATTERN WAFER" on Sep 17, 2024. With publication no. WO/2025/082683, the details related to the patent application was published on Apr 24, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): YE, Ning (80 W Tasman DriveSan Jose, California 95134), ZHANG, Jian (80 W Tasman DriveSan Jose, California 95134), CHANG, YuSheng (80 W Tasman DriveSan Jose, California 95134), KANG, Zhiwen (80 W Tasman DriveSan Jose, California 951...